Richard Allen
richard.allen@sematech.org
257 Fuller Road
Suite 2200
Albany, New York, USA 12203
518-649-1136
Larry Smith
larry.smith@sematech.org
257 Fuller Road
Suite 2200
Albany, New York, USA 12203
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About this Wiki
The purpose of this Wiki is to provide a forum to discuss the challenges, and possible solutions, related to advanced integrated circuit manufacture.
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June 3, 2010
16:18 EDT
September 26, 2011
11:21 EDT
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Rich Allen
Recently Added
- Guide for Incoming/Outgoing Quality Control and Testing Flow for 3DS-IC Products (D5485)
- Guide for CMP and Micro-bump Processes for Frontside TSV Integration (D5474)
- Guide for Alignment Mark for 3DS-IC Process (D5473)
- Test Method for Measuring Warp, Bow and TTV on Silicon and Glass Wafers Mounted on Wire Grids by Automated Non-Contact Scanning using Laser Scanning Interferometry (D5506)
- Terminology for Measured Geometrical Parameters of Through-Glass Vias (TGVs) in 3DS-IC Structures (D5447)
- Specification for Glass Wafers for Use in Bonded Wafer Stacks (3D2-0113) PUBLISHED STANDARD
- Middle End Process Task Force
- Guide for Metrology for Measuring Thickness, Total Thickness Variation (TTV), Bow, Warp/Sori, and Flatness of Bonded Wafer Stacks (D5409)
- Wide IO DRAM Memory Specification – Low Power DRAM: Gen 2
- 3DS IC Testing Task Force
Recently Modified
- SEMI Standard Activities
- Specification for Glass Wafers for Use in Bonded Wafer Stacks (3D2-0113) PUBLISHED STANDARD
- Test Method for Wafer Bond Strength Measurements Using Micro-Chevron Test Structures (MS5-1211) PUBLISHED STANDARD
- Guide for CMP and Micro-bump Processes for Frontside TSV Integration (D5474)
- Guide for Multi-Wafer Transport and Storage Containers for Thin Wafers (D5175)
- Guide for Metrology Techniques to be used in Measurement of Geometrical Parameters of Through-Silicon Vias (TSVs) in 3DS-IC Structures (D5410)
- Guide for Metrology for Measuring Thickness, Total Thickness Variation (TTV), Bow, Warp/Sori, and Flatness of Bonded Wafer Stacks (D5409)
- Guide for Describing Materials Properties for a 300 mm 3DS-IC Wafer Stack (D5173D)
- 3D Standards Dashboard
- Wide IO DRAM Memory Specification – Low Power DRAM. PUBLISHED STANDARD: JESD229
